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DeCS
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Descriptor English:
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Microtechnology
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Descriptor Spanish:
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Microtecnología
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Descriptor Portuguese:
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Microtecnologia
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Synonyms English:
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Microfabrication
Microfabrications
Micromachining
Micromachinings
Micromanufacturing
Micromanufacturings
Microtechnologies
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Tree Number:
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H01.570
J01.897.520.500
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Definition English:
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Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms. |
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History Note English:
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2009
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Allowable Qualifiers English:
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Record Number:
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53362
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Unique Identifier:
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D055616
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Occurrence in VHL:
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Similar:
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DeCS
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